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| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | ENTEGRIS INC | ENTG | 2,016,982 | -38,819 | 223,521,945,000 | 54,925,705,000 | $110,820.00 |
| 03/31/2023 | ENTEGRIS INC | ENTG | 2,055,801 | 200,568 | 168,596,240,000 | 168,442,219,000 | $82,010.00 |
| 09/30/2022 | ENTEGRIS INC | ENTG | 1,855,233 | 247,093 | 154,021,000 | 5,863,000 | $83.02 |
| 06/30/2022 | ENTEGRIS INC | ENTG | 1,608,140 | 88,632 | 148,158,000 | -51,293,000 | $92.13 |
| 03/31/2022 | ENTEGRIS INC | ENTG | 1,519,508 | -9,739 | 199,451,000 | -12,472,000 | $131.26 |
| 12/31/2021 | ENTEGRIS INC | ENTG | 1,529,247 | -111,391 | 211,923,000 | 5,367,000 | $138.58 |
| 09/30/2021 | ENTEGRIS INC | ENTG | 1,640,638 | -19,266 | 206,556,000 | 2,438,000 | $125.90 |
| 06/30/2021 | ENTEGRIS INC | ENTG | 1,659,904 | -70,811 | 204,118,000 | 10,624,000 | $122.97 |
| 03/31/2021 | ENTEGRIS INC | ENTG | 1,730,715 | -19,288 | 193,494,000 | 25,319,000 | $111.80 |
| 12/31/2020 | ENTEGRIS INC | ENTG | 1,750,003 | -78,744 | 168,175,000 | 32,226,000 | $96.10 |
| 09/30/2020 | ENTEGRIS INC | ENTG | 1,828,747 | -262,607 | 135,949,000 | 12,455,000 | $74.34 |
| 06/30/2020 | ENTEGRIS INC | ENTG | 2,091,354 | -292,446 | 123,494,000 | 16,771,000 | $59.05 |
| 03/31/2020 | ENTEGRIS INC | ENTG | 2,383,800 | -450,069 | 106,723,000 | -35,225,000 | $44.77 |
| 12/31/2019 | ENTEGRIS INC | ENTG | 2,833,869 | 125,554 | 141,948,000 | 14,495,000 | $50.09 |
| 09/30/2019 | ENTEGRIS INC | ENTG | 2,708,315 | -236,313 | 127,453,000 | 17,559,000 | $47.06 |
| 06/30/2019 | ENTEGRIS INC | ENTG | 2,944,628 | -248,333 | 109,894,000 | -4,063,000 | $37.32 |
| 03/31/2019 | ENTEGRIS INC | ENTG | 3,192,961 | -136,733 | 113,957,000 | 21,075,000 | $35.69 |
| 12/31/2018 | ENTEGRIS INC | ENTG | 3,329,694 | 115,417 | 92,882,000 | -171,000 | $27.90 |
| 09/30/2018 | ENTEGRIS INC | ENTG | 3,214,277 | 237,219 | 93,053,000 | -7,869,000 | $28.95 |
| 06/30/2018 | ENTEGRIS INC | ENTG | 2,977,058 | -3,788 | 100,922,000 | -2,811,000 | $33.90 |
| 03/31/2018 | ENTEGRIS INC | ENTG | 2,980,846 | -23,443 | 103,733,000 | 12,252,000 | $34.80 |
| 12/31/2017 | ENTEGRIS INC | ENTG | 3,004,289 | -139,392 | 91,481,000 | 786,000 | $30.45 |
| 09/30/2017 | ENTEGRIS INC | ENTG | 3,143,681 | -80,787 | 90,695,000 | 19,918,000 | $28.85 |
| 06/30/2017 | ENTEGRIS INC | ENTG | 3,224,468 | 97,710 | 70,777,000 | 14,808,000 | $21.95 |
| 12/31/2016 | ENTEGRIS INC | ENTG | 3,126,758 | -65,261 | 55,969,000 | 364,000 | $17.90 |
| 09/30/2016 | ENTEGRIS INC | ENTG | 3,192,019 | -53,614 | 55,605,000 | 8,641,000 | $17.42 |
| 06/30/2016 | ENTEGRIS INC | ENTG | 3,245,633 | 3,245,633 | 46,964,000 | 46,964,000 | $14.47 |
| 03/31/2016 | ENTEGRIS INC | ENTG | 3,235,440 | -766,424 | 44,067,000 | 6,510,000 | $13.62 |
| 12/31/2015 | ENTEGRIS INC | ENTG | 3,445,836 | -364,093 | 45,726,000 | 7,017,000 | $13.27 |
| 09/30/2015 | ENTEGRIS INC | ENTG | 3,784,444 | -25,485 | 49,917,000 | 11,208,000 | $13.19 |
| 06/30/2015 | ENTEGRIS INC | ENTG | 3,810,165 | 272,988 | 55,514,000 | 12,679,000 | $14.57 |
| 03/31/2015 | ENTEGRIS INC | ENTG | 3,815,907 | 278,730 | 52,240,000 | 9,405,000 | $13.69 |
| 12/31/2014 | ENTEGRIS INC | ENTG | 3,797,048 | 21,044 | 50,159,000 | -1,742,000 | $13.21 |
| 09/30/2014 | ENTEGRIS INC | ENTG | 3,769,894 | -6,110 | 43,354,000 | -8,547,000 | $11.50 |
| 06/30/2014 | ENTEGRIS INC | ENTG | 3,776,004 | 238,827 | 51,901,000 | 9,066,000 | $13.74 |
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